The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 22, 2015
Filed:
Oct. 23, 2014
Zygo Corporation, Middlefield, CT (US);
Peter J. de Groot, Middletown, CT (US);
Michael Schroeder, East Hampton, CT (US);
Zygo Corporation, Middlefield, CT (US);
Abstract
An encoder interferometry system includes a beam splitting element positioned to receive an input beam from a light source, in which the beam splitting element is configured to direct a first portion of the input beam along a measurement path to define a measurement beam and a second portion of the input beam along a reference path to define a reference beam, an encoder scale positioned to diffract the measurement beam at least once, one or more optical components configured and arranged to alter a direction of a first diffracted portion of the measurement beam and a direction of a second diffracted portion of the measurement beam such that beam paths of the first diffracted portion and the second diffracted portion are non-parallel subsequent to the first diffracted portion and the second diffracted portion passing through the beam splitting element, and a detector positioned to receive the first diffracted portion.