The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 22, 2015
Filed:
Dec. 11, 2012
Applicant:
Ulvac, Inc., Chigasaki-shi, Kanagawa, JP;
Inventors:
Yutaka Kadowaki, Chiba, JP;
Kazutoshi Takahashi, Chiba, JP;
Masaru Sato, Chiba, JP;
Chengfu Lin, Chiba, JP;
Assignee:
ULVAC, INC., Chigasaki-shi, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C 14/34 (2006.01); C23C 14/06 (2006.01); C23C 14/32 (2006.01); B23K 1/00 (2006.01);
U.S. Cl.
CPC ...
C23C 14/3407 (2013.01); C23C 14/0641 (2013.01); C23C 14/32 (2013.01); B23K 1/0008 (2013.01);
Abstract
To provide a target device that can easily be reused in which the amount of gas discharge is small. The present invention is a target device including a backing plate and a target plate that is fixed to the backing plate with a metal brazing material, in which a protective film made of a TiN thin film in which a proportion of (111) plane is at a maximum is formed on an exposed portion of the backing plate. The discharge amount of gas is small, and the brazing material that adheres when fixing the target plate can be easily peeled off.