The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 22, 2015
Filed:
Dec. 05, 2013
Applicant:
Asahi Kasei E-materials Corporation, Tokyo, JP;
Inventors:
Assignee:
ASAHI KASEI E-MATERIALS CORPORATION, Tokyo, JP;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
C03C 25/68 (2006.01); C09K 13/00 (2006.01); H01L 21/033 (2006.01); H01L 21/3213 (2006.01); B82Y 40/00 (2011.01);
U.S. Cl.
CPC ...
C09K 13/00 (2013.01); H01L 21/0337 (2013.01); H01L 21/32134 (2013.01); B82Y 40/00 (2013.01);
Abstract
In order to provide a copper oxide etchant and an etching method using the same capable of selectively etching exposure/non-exposure portions when laser light exposure is performed by using copper oxide as a thermal-reactive resist material, the copper oxide etchant for selectively etching copper oxides having different oxidation numbers in a copper oxide-containing layer containing the copper oxide as a main component contains at least a chelating agent or salts thereof.