The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 22, 2015
Filed:
Sep. 14, 2011
Tsutomu Hiroki, Yamana, JP;
Toshinao Kato, Shizuoka, JP;
Tsutomu Hiroki, Yamana, JP;
Toshinao Kato, Shizuoka, JP;
TOKYO ELECTRON LIMITED, Tokyo, JP;
SANKYO SEISAKUSHO CORPORATION, Tokyo, JP;
Abstract
A transfer device can control a posture of a holding table accurately and prevent the holding table from wobbling even when the holding table is moved at a high speed. A first posture holding linkand a second posture holding linkare provided at the transfer device. One end of the first posture holding linkand one end of the second posture holding linkare rotatably connected to a connecting shaft. Railsandare fastened to a base plateof the holding table. Rollersandare connected to the connecting shaftto be rotated about an axis line. The rollersandare in contact with roller driving portionsand. When the holding tableis moved, the rollersandare rotated on the roller driving portionsand