The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 15, 2015
Filed:
Sep. 14, 2012
Kalyan Kumar Mankala, Hamden, CT (US);
Roberto Bernardo Wiener, Ridgefield, CT (US);
Pradeep Kumar Govil, Norwalk, CT (US);
Andrew Nelson, Bettendof, IA (US);
Kalyan Kumar Mankala, Hamden, CT (US);
Roberto Bernardo Wiener, Ridgefield, CT (US);
Pradeep Kumar Govil, Norwalk, CT (US);
Andrew Nelson, Bettendof, IA (US);
ASML Holding N.V., Veldhoven, NL;
Abstract
A magnetic shield having non-magnetic gaps provides reduced magnetic cross-talk for a linear motor array in a precision positioning system. Redirecting the leakage flux limits the cross-talk and associated deleterious effects. Such preferred magnetic circuit paths for the leakage are affixed to the moving magnet system of the linear motor. Embodiments of the preferred flux leakage paths are realized by providing a ferromagnetic shield separated by a non-magnetic gap between the permanent magnets and the back-irons. In another embodiment, the ferromagnetic shield separation includes diamagnetic materials.