The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Sep. 15, 2015

Filed:

Dec. 30, 2013
Applicant:

Semiconductor Manufacturing International (Shanghai) Corporation, Shanghai, CN;

Inventor:

De Yuan Xiao, Shanghai, CN;

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 21/8238 (2006.01); H01L 21/8252 (2006.01); H01L 21/8258 (2006.01); H01L 29/78 (2006.01); H01L 29/06 (2006.01); H01L 29/10 (2006.01); H01L 29/165 (2006.01);
U.S. Cl.
CPC ...
H01L 21/823878 (2013.01); H01L 21/8252 (2013.01); H01L 21/8258 (2013.01); H01L 29/0653 (2013.01); H01L 29/1054 (2013.01); H01L 29/1083 (2013.01); H01L 29/7838 (2013.01); H01L 29/165 (2013.01);
Abstract

Fabrication methods for junctionless transistor and complementary junctionless transistor. An isolation layer doped with a first-type ion is formed on a semiconductor substrate and an active layer doped with a second-type ion is formed on the isolation layer. The active layer includes a first portion between a second portion and a third portion of the active layer. Portions of the isolation layer under the second and third portions of the active layer are removed to suspend the second and third portions of the active layer. A gate structure is formed on the first portion of the active layer. A source and a drain are formed by doping the second portion and the third portion of the active layer with the second-type ion on both sides of the gate structure. The source and the drain have a same doping type as the first portion of the active layer.


Find Patent Forward Citations

Xiao, De. (2015). Transistor device and fabrication method (U.S. Patent No. 9136183). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/9136183

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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