The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 15, 2015
Filed:
Jun. 24, 2011
Fredrik Wilhelm Van Der Blij, Waalre, NL;
Edwin Johan Buis, Belfeld, NL;
Pieter Renaat Maria Hennus, Peer, BE;
Johannes Charles Adrianus Van Den Berg, Prinsenbeek, NL;
Johannes Andreas Henricus Maria Jacobs, Veldhoven, NL;
Fredrik Wilhelm Van Der Blij, Waalre, NL;
Edwin Johan Buis, Belfeld, NL;
Pieter Renaat Maria Hennus, Peer, BE;
Johannes Charles Adrianus Van Den Berg, Prinsenbeek, NL;
Johannes Andreas Henricus Maria Jacobs, Veldhoven, NL;
ASML Netherlands B.V., Veldhoven, NL;
Abstract
An actuator comprising a first part and a second part, the first part being configured to move relative to the second part, wherein a labyrinth seal is provided between the first part and the second part, the labyrinth seal being configured to restrict the flow of gas from a first side of the labyrinth seal to a second side of the labyrinth seal, wherein one or more inlets and one or more outlets are provided within the labyrinth seal, the one or more inlets being configured to provide gas to a location within the labyrinth seal and the one or more outlets being configured to remove at least part of the gas from a location within the labyrinth seal.