The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 15, 2015
Filed:
May. 29, 2013
Applicants:
Ralph Pulwey, Aalen, DE;
Josef Biberger, Wildenberg, DE;
Inventors:
Ralph Pulwey, Aalen, DE;
Josef Biberger, Wildenberg, DE;
Assignee:
CARL ZEISS MICROSCOPY GMBH, Jena, DE;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01J 37/302 (2006.01); H01J 37/317 (2006.01); H01J 3/26 (2006.01); H01J 37/305 (2006.01);
U.S. Cl.
CPC ...
H01J 37/3026 (2013.01); H01J 3/26 (2013.01); H01J 37/302 (2013.01); H01J 37/3023 (2013.01); H01J 37/3056 (2013.01); H01J 37/3174 (2013.01); H01J 2237/1536 (2013.01); H01J 2237/30483 (2013.01); H01J 2237/30488 (2013.01);
Abstract
A method of scanning a surface of an object using a particle beam comprises: determining a surface portion of the surface of the object, wherein the surface portion is to be scanned; determining initial positions of a set of raster points within the surface portion; changing the positions of at least some raster points of the set of raster points; and then scanning the surface portion by directing the particle beam to the positions of the raster points.