The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Sep. 15, 2015

Filed:

Sep. 14, 2007
Applicants:

Dirk Schaffer, Aalen, DE;

Willi Heintel, Aalen, DE;

Hagen Federau, Augsburg, DE;

Joachim Hartjes, Aalen, DE;

Harald Kirchner, Munich, DE;

Inventors:

Dirk Schaffer, Aalen, DE;

Willi Heintel, Aalen, DE;

Hagen Federau, Augsburg, DE;

Joachim Hartjes, Aalen, DE;

Harald Kirchner, Munich, DE;

Assignee:

Carl Zeiss SMT GmbH, Oberkochen, DE;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03B 27/68 (2006.01); G03B 27/52 (2006.01); G03B 27/54 (2006.01); G02B 7/02 (2006.01); G03F 7/20 (2006.01); G03B 27/42 (2006.01); G02B 7/00 (2006.01);
U.S. Cl.
CPC ...
G02B 7/026 (2013.01); G03F 7/70825 (2013.01); G02B 7/008 (2013.01);
Abstract

There is provided an optical element unit comprising an optical element, a connector element, and an optical element holder. The optical element has a plane of main extension as well as an outer circumference and defines a radial direction. The connector element connects the optical element and the optical element holder, the connector element having a first connector part connected to the optical element at the outer circumference and a second connector part connected to the optical element holder. The first connector part and the second connector part are connected via at least one coupling part, the coupling part being compliant in the radial direction and substantially preventing rotation between the first connector part and the second connector part in a plane substantially parallel to the plane of main extension.


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