The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Sep. 08, 2015

Filed:

Jan. 10, 2013
Applicant:

Gigaphoton Inc., Tochigi, JP;

Inventors:

Takahito Kumazaki, Tochigi, JP;

Takashi Matsunaga, Tochigi, JP;

Kazuya Takezawa, Tochigi, JP;

Assignee:

GIGAPHOTON INC., Tochigi, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01S 3/22 (2006.01); H01S 3/04 (2006.01); G02B 7/00 (2006.01); H01S 3/08 (2006.01); H01S 3/106 (2006.01); H01S 3/225 (2006.01); H01S 3/23 (2006.01);
U.S. Cl.
CPC ...
H01S 3/04 (2013.01); G02B 7/008 (2013.01); H01S 3/0401 (2013.01); H01S 3/08036 (2013.01); H01S 3/08004 (2013.01); H01S 3/08009 (2013.01); H01S 3/106 (2013.01); H01S 3/225 (2013.01); H01S 3/2333 (2013.01);
Abstract

An excimer laser may include a frame, a base plate on which the frame is disposed, an excimer laser configured to oscillate and output laser light by discharge-pumping within a chamber containing a laser gas, an optical element that is mounted upon the frame and that is disposed in the optical path of the outputted laser light and a heat removal mechanism connected to both the frame and the base plate.


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