The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Sep. 08, 2015

Filed:

Sep. 10, 2013
Applicants:

Frank K. Baker, Jr., Austin, TX (US);

Cheong Min Hong, Austin, TX (US);

Inventors:

Frank K. Baker, Jr., Austin, TX (US);

Cheong Min Hong, Austin, TX (US);

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 29/66 (2006.01); H01L 21/28 (2006.01); H01L 27/115 (2006.01);
U.S. Cl.
CPC ...
H01L 29/66833 (2013.01); H01L 21/28273 (2013.01); H01L 27/11546 (2013.01); H01L 29/66825 (2013.01);
Abstract

A method of making a semiconductor device includes depositing a layer of polysilicon in a non-volatile memory (NVM) region and a logic region of a substrate. The layer of polysilicon is patterned into a gate in the NVM region while the layer of polysilicon remains in the logic region. A memory cell is formed including the gate in the NVM region while the layer of polysilicon remains in the logic region. The layer of polysilicon in the logic region is removed and the substrate is implanted to form a well region in the logic region after the memory cell is formed. A layer of gate material is deposited in the logic region. The layer of gate material is patterned into a logic gate in the logic region.


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