The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Sep. 08, 2015

Filed:

Feb. 26, 2013
Applicant:

Semiconductor Manufacturing International Corp., Shanghai, CN;

Inventor:

Wenbo Wang, Shanghai, CN;

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 21/20 (2006.01); H01L 29/78 (2006.01); H01L 29/66 (2006.01); H01L 21/02 (2006.01); H01L 27/12 (2006.01); H01L 21/84 (2006.01);
U.S. Cl.
CPC ...
H01L 29/66795 (2013.01); H01L 21/0262 (2013.01); H01L 21/02381 (2013.01); H01L 21/02532 (2013.01); H01L 21/02639 (2013.01); H01L 21/84 (2013.01); H01L 27/1203 (2013.01); H01L 29/785 (2013.01);
Abstract

A fin field effect transistor (FET) including a fin structure and a method for forming the fin FET are provided. In an exemplary method, the fin FET can be formed by forming at least one fin seed, including a top surface and sidewalls, on a substrate. A first semiconductor layer can then be formed at least on the sidewalls of the at least one fin seed. A second semiconductor layer can be formed on the first semiconductor layer. The second semiconductor layer and the at least one fin seed can be made of a same material. The first semiconductor layer can be removed to form a fin structure including the at least one fin seed and the second semiconductor layer.


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