The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Sep. 08, 2015

Filed:

Apr. 25, 2014
Applicants:

Fei Company, Hillsboro, OR (US);

Max-planck-gesellschaft Zur Foerderung Der Wissenschaften E. V., Munich, DE;

Inventors:

Bart Buijsse, Eindhoven, NL;

Radostin Stoyanov Danev, Munich, DE;

Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
H01J 37/26 (2006.01); G21K 5/04 (2006.01); H01J 37/285 (2006.01);
U.S. Cl.
CPC ...
H01J 37/263 (2013.01); H01J 37/285 (2013.01); H01J 2237/2614 (2013.01);
Abstract

The invention relates to a method of using a phase plate, having a thin film, in a transmission electron microscope (TEM), comprising: introducing the phase plate in the TEM; preparing the phase plate by irradiating the film with a focused electron beam; introducing a sample in the TEM; and forming an image of the sample using the prepared phase plate, wherein preparing the phase plate involves locally building up a vacuum potential resulting from a change in the electronic structure of the thin film by irradiating the phase plate with a focused beam of electrons, the vacuum potential leading to an absolute phase shift |φ| with a smaller value than at the non-irradiated thin film. Preferably the phase plate is heated to avoid contamination. The phase shift achieved with this phase plate can be tuned by varying the diameter of the irradiated spot.


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