The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 08, 2015
Filed:
Mar. 25, 2014
Applicant:
Hitachi High-tech Science Corporation, Minato-ku, Tokyo, JP;
Inventors:
Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G21K 5/04 (2006.01); H01J 27/26 (2006.01); H01J 37/08 (2006.01); H01J 1/15 (2006.01); H01J 1/18 (2006.01); H01J 3/04 (2006.01);
U.S. Cl.
CPC ...
H01J 27/26 (2013.01); H01J 1/15 (2013.01); H01J 1/18 (2013.01); H01J 3/04 (2013.01); H01J 37/08 (2013.01); H01J 2237/06316 (2013.01);
Abstract
There is provided an emitter structure, a gas ion source including the emitter structure, and a focused ion beam system including the gas ion source. The emitter structure includes a pair of conductive pins which are fixed to a base member, a filament which is connected between the pair of conductive pins, and an emitter which is connected to the filament and has a sharp tip. A supporting member is fixed to the base material, and the emitter is connected to the supporting member.