The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Sep. 08, 2015

Filed:

Jun. 30, 2014
Applicants:

Samsung Display Co., Ltd., Yongin, Gyeonggi-Do, KR;

Dongwoo Fine-chem Co., Ltd., Iksan-si, Jeollabuk-do, KR;

Inventors:

Seon-il Kim, Seoul, KR;

In-Bae Kim, Yongin-si, KR;

Hongsick Park, Suwon-si, KR;

Jong-Hyun Choung, Hwaseong-si, KR;

Inseol Kuk, Jeollanam-do, KR;

Suckjun Lee, Jeonju-si, KR;

Giyong Nam, Anyang-si, KR;

Youngchul Park, Iksan-si, KR;

Inho Yu, Iksan-si, KR;

Youngjin Yoon, Jeonju-si, KR;

Assignees:

SAMSUNG DISPLAY CO., LTD., Yongin, Gyeonggi-do, KR;

DONGWOO FINE-CHEM CO., LTD., Iksan-si, Jeollabuk-do, KR;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/3213 (2006.01); C09K 13/06 (2006.01); C09K 13/08 (2006.01); C23F 1/18 (2006.01);
U.S. Cl.
CPC ...
C23F 1/18 (2013.01); C09K 13/06 (2013.01); C09K 13/08 (2013.01); H01L 21/32134 (2013.01);
Abstract

An etchant includes, based on a total amount of the etchant, from about 0.5 to about 20 wt % of a persulfate, from about 0.01 to about 2 wt % of a fluorine compound, from about 1 to about 10 wt % of an inorganic acid, from about 0.5 to about 5 wt % of an azole compound, from about 0.1 to about 5 wt % of an electron-donating compound, from about 0.1 to about 5 wt % of a chlorine compound, from about 0.05 to about 3 wt % of a copper salt, from about 0.1 to about 10 wt % of an organic acid or an organic acid salt, and a remaining amount of water.


Find Patent Forward Citations

Loading…