The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 01, 2015
Filed:
Dec. 26, 2011
Muneyuki Fukuda, Tokyo, JP;
Yoichi Ose, Tokyo, JP;
Mitsugu Sato, Tokyo, JP;
Hiroyuki Ito, Tokyo, JP;
Hiroshi Suzuki, Tokyo, JP;
Naomasa Suzuki, Tokyo, JP;
Muneyuki Fukuda, Tokyo, JP;
Yoichi Ose, Tokyo, JP;
Mitsugu Sato, Tokyo, JP;
Hiroyuki Ito, Tokyo, JP;
Hiroshi Suzuki, Tokyo, JP;
Naomasa Suzuki, Tokyo, JP;
Hitachi High-Technologies Corporation, Tokyo, JP;
Abstract
A diffraction aberration corrector formed by the multipole of the solenoid coil ring and having a function of adjusting the degree of orthogonality or axial shift of the vector potential with respect to the beam axis. In order to cause a phase difference, the diffraction aberration corrector that induces a vector potential, which is perpendicular to the beam axis and has a symmetrical distribution within the orthogonal plane with respect to the beam axis, is provided near the objective aperture and the objective lens. A diffracted wave traveling in a state of being inclined from the beam axis passes through the ring of the magnetic flux. Since the phase difference within the beam diameter is increased by the Aharonov-Bohm effect due to the vector potential, the intensity of the electron beam on the sample is suppressed.