The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 01, 2015
Filed:
Aug. 09, 2012
Applicants:
Masatoshi Echigo, Hiratsuka, JP;
Masako Yamakawa, Hiratsuka, JP;
Inventors:
Masatoshi Echigo, Hiratsuka, JP;
Masako Yamakawa, Hiratsuka, JP;
Assignee:
MITSUBISHI GAS CHEMICAL COMPANY, INC., Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03F 7/004 (2006.01); C07C 39/17 (2006.01); C07C 39/42 (2006.01); G03F 7/038 (2006.01); G03F 7/039 (2006.01);
U.S. Cl.
CPC ...
G03F 7/004 (2013.01); C07C 39/17 (2013.01); C07C 39/42 (2013.01); G03F 7/038 (2013.01); G03F 7/0045 (2013.01); G03F 7/039 (2013.01);
Abstract
A cyclic compound having a molecular weight of 500 to 5000 is represented by the following formula (1), wherein at least one of Ris a monovalent group containing an iodine atom. Also disclosed are a method for producing the cyclic compound, a composition containing the cyclic compound, and a method for forming a resist pattern using the composition.