The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 01, 2015
Filed:
Oct. 28, 2009
Applicants:
Michael N. Miller, Austin, TX (US);
Cynthia B. Brooks, Austin, TX (US);
Laura Anne Brown, Austin, TX (US);
Gerard M. Schmid, Austin, TX (US);
Inventors:
Michael N. Miller, Austin, TX (US);
Cynthia B. Brooks, Austin, TX (US);
Laura Anne Brown, Austin, TX (US);
Gerard M. Schmid, Austin, TX (US);
Assignees:
Canon Nanotechnologies, Inc., Austin, TX (US);
Molecular Imprints, Inc., Austin, TX (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03F 7/00 (2006.01); B82Y 10/00 (2011.01); B82Y 40/00 (2011.01); G11B 5/855 (2006.01);
U.S. Cl.
CPC ...
G03F 7/0002 (2013.01); B82Y 10/00 (2013.01); B82Y 40/00 (2013.01); G11B 5/855 (2013.01);
Abstract
Systems and methods for providing multiple replicas from a master template are described. Replicas may be formed having a mesa. In one embodiment, a dummy fill region may be included on master template and/or replicas.