The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 01, 2015
Filed:
Jun. 28, 2011
Jing Zhu, Shanghai, CN;
Huijie Huang, Shanghai, CN;
Aijun Zeng, Shanghai, CN;
Zhonghua HU, Shanghai, CN;
Baoxi Yang, Shanghai, CN;
Ming Chen, Shanghai, CN;
Jing Zhu, Shanghai, CN;
Huijie Huang, Shanghai, CN;
Aijun Zeng, Shanghai, CN;
Zhonghua Hu, Shanghai, CN;
Baoxi Yang, Shanghai, CN;
Ming Chen, Shanghai, CN;
Abstract
A detection apparatus and method for testing optical performance of beam shaping element used in ultraviolet lithography machine; The apparatus comprises visible wavelength laser and other optical units placed along the optical axis including, in order from laser side, (a) beam expander lens group, (b) beam splitter, (c) first far field imaging lens, (d) adjustable aperture or (e) CCD image sensor, (f) second far field imaging lens and (g) energy sensor. The detection apparatus is suitable be employed to detect the optical performance of beam shaping element working at any ultraviolet band, and provides the features of low cost, easy operation and quick measurement.