The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 01, 2015
Filed:
Oct. 15, 2013
Nippon Tungsten Co., Ltd., Fukuoka, JP;
Shinko Electric Industries Co., Ltd., Nagano, JP;
Trek Holding Co., Ltd., Tokyo, JP;
Japan Fine Ceramics Center, Aichi, JP;
Kouta Tsutsumi, Fukuoka, JP;
Mitsuyoshi Nagano, Fukuoka, JP;
Koki Tamagawa, Nagano, JP;
Norio Shiraiwa, Nagano, JP;
Tadayoshi Yoshikawa, Nagano, JP;
Miki Saito, Nagano, JP;
Toshio Uehara, Tokyo, JP;
Hideaki Matsubara, Aichi, JP;
Tetsushi Matsuda, Aichi, JP;
Nippon Tungsten Co., Ltd., Fukuoka, JP;
Shinko Electric Industries Co., Ltd., Nagano, JP;
Trek Holding Co., Ltd., Tokyo, JP;
Japan Fine Ceramics Center, Aichi, JP;
Abstract
A dielectric layer for an electrostatic chuck is formed of a ceramic material having a first phase including aluminum oxide and a second phase including composite carbonitride (Ti, Me)(C, N) that contains titanium as fine grains. The Me represents a transition element and metals of Group 4 to Group 6 such as Mo and W. The ceramic material that includes the second phase by 0.05 vol % to 2.5 vol % has a volume resistivity value of about 10to 10(Ω·cm) necessary for a Johnsen-Rahbek type electrostatic chuck.