The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 01, 2015
Filed:
Jul. 23, 2013
Applicant:
Asm Ip Holding B.v., Almere, NL;
Inventor:
Sang-Jin Jeong, Cheonan-si, KR;
Assignee:
ASM IP HOLDINGS B.V., Almere, NL;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B05C 13/00 (2006.01); C23C 16/458 (2006.01); H01L 21/687 (2006.01);
U.S. Cl.
CPC ...
B05C 13/00 (2013.01); C23C 16/4583 (2013.01); H01L 21/68742 (2013.01);
Abstract
A deposition apparatus includes a substrate supporting pin that is fixed to a supporting plate through an autoalignment control unit to prevent the substrate supporting pin from being broken when loading or unloading a substrate, thereby preventing damaging the substrate and also preventing decreased yield that may result due to the breakage of the substrate supporting pin.