The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 25, 2015
Filed:
Feb. 03, 2010
Gotthart Seifert, Dresden, DE;
Helmut Hermann, Dresden, DE;
Konstyantyn Zagorodniy, Cologne, DE;
Ehrenfried Zschech, Moritzburg, DE;
Gotthart Seifert, Dresden, DE;
Helmut Hermann, Dresden, DE;
Konstyantyn Zagorodniy, Cologne, DE;
Ehrenfried Zschech, Moritzburg, DE;
LEIBNIZ-INSTITUT FUER FESTKOERPER-UND WERKSTOFFFORSCHUNG DRESDEN E.V., Dresden, DE;
GLOBALFOUNDRIES INC., Cayman Islands, KY;
Abstract
The invention relates to the fields of microelectronics and materials sciences and concerns an insulation layer material for integrated circuits in microelectronics, which can be used, for example, in integrated circuits as insulation material in semiconductor components. The object of the present invention is to disclose an insulation material for integrated circuits, which has dielectric constants of k≦2 with good mechanical properties at the same time. The object is attained with an insulation material for integrated circuits, containing at least MOFs and/or COFs.