The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 25, 2015
Filed:
Aug. 18, 2010
Applicants:
Friedrich Paul Lindner, Schärding, AT;
Thomas Glinsner, St. Florian am Inn, AT;
Markus Wimplinger, Ried im Innkreis, AT;
Inventors:
Friedrich Paul Lindner, Schärding, AT;
Thomas Glinsner, St. Florian am Inn, AT;
Markus Wimplinger, Ried im Innkreis, AT;
Assignee:
EV Group E. Thallner GmbH, St. Florian, AT;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G03F 7/00 (2006.01); B82Y 40/00 (2011.01); G03F 7/16 (2006.01); B05C 21/00 (2006.01); B82Y 10/00 (2011.01);
U.S. Cl.
CPC ...
G03F 7/0002 (2013.01); B82Y 10/00 (2013.01); B82Y 40/00 (2013.01);
Abstract
The invention relates to a device for embossing of substrates, especially semiconductor substrates or wafers, comprised of: