The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 25, 2015
Filed:
May. 28, 2013
Mitutoyo Corporation, Kanagawa, JP;
Yoshimasa Suzuki, Ibaraki, JP;
Akinori Saito, Ibaraki, JP;
MITUTOYO CORPORATION, Kanagawa, JP;
Abstract
A profile measuring instrument includes: a fixed member of which position relative to a workpiece having a surface to be profile-measured is fixed; a scanning member supported by the fixed member and movable in a scan direction along the surface of the workpiece relative to the fixed member; a laser interferometer that detects a displacement of the surface of the workpiece along the scan direction. The laser interferometer includes: a polarizing beamsplitter provided to the scanning member; a reference mirror fixed to the fixed member; a measurement optical path extending from the polarizing beamsplitter to the workpiece; and a reference optical path extending from the polarizing beamsplitter to the reference mirror. A difference between an optical path length of the measurement optical path and an optical path length of the reference optical path is a predetermined tolerable error or less.