The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 25, 2015
Filed:
Jul. 06, 2012
Applicant:
Enrico Rigon, Merano, IT;
Inventor:
Enrico Rigon, Merano, IT;
Assignee:
MEMC Electronic Materials S.p.A., Novara, IT;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01J 5/00 (2006.01); G01K 13/00 (2006.01); C23C 16/24 (2006.01); C01B 33/035 (2006.01); C23C 16/46 (2006.01); C23C 16/52 (2006.01); G05D 23/27 (2006.01);
U.S. Cl.
CPC ...
C23C 16/24 (2013.01); C01B 33/035 (2013.01); C23C 16/46 (2013.01); C23C 16/52 (2013.01); G05D 23/27 (2013.01);
Abstract
Systems and methods are disclosed for monitoring and controlling silicon rod temperature. One example is a method of monitoring a surface temperature of at least one silicon rod in a chemical vapor deposition (CVD) reactor during a CVD process. The method includes capturing an image of an interior of the CVD reactor. The image includes a silicon rod. The image is scanned to identify a left edge of the silicon rod and a right edge of the silicon rod. A target area is identified midway between the left edge and the right edge. A temperature of the silicon rod in the target area is determined.