The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 25, 2015
Filed:
Jul. 16, 2014
Applicants:
Volker Schmitz, Pfullingen, DE;
Axel Grosse, Pfullingen, DE;
Inventors:
Volker Schmitz, Pfullingen, DE;
Axel Grosse, Pfullingen, DE;
Assignee:
ROBERT BOSCH GMBH, Stuttgart, DE;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 23/48 (2006.01); B81B 7/00 (2006.01);
U.S. Cl.
CPC ...
B81B 7/0006 (2013.01); B81B 7/007 (2013.01); B81B 7/0032 (2013.01); B81B 2203/01 (2013.01); B81B 2203/03 (2013.01); B81B 2207/07 (2013.01); B81C 2203/0136 (2013.01);
Abstract
A micromechanical component having a substrate, a micromechanical functional layer situated above the substrate, and an encapsulation layer situated above the functional layer, and a method for producing the micromechanical component are provided, the encapsulation layer having at least one trench, and a bridging of the trench by at least one electrically insulating connection link is provided.