The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 18, 2015
Filed:
Oct. 06, 2011
Ralf Peter Brinkmann, Erkrath, DE;
Jens Oberrath, Bochum, DE;
Peter Awakowicz, Bochum, DE;
Martin Lapke, Hamburg, DE;
Thomas Musch, Bochum, DE;
Thomas Mussenbrock, Wuppertal, DE;
Ilona Rolfes, Bochum, DE;
Christian Schulz, Bochum, DE;
Robert Storch, Bochum, DE;
Tim Styrnoll, Bochum, DE;
Christian Zietz, Hannover, DE;
Ralf Peter Brinkmann, Erkrath, DE;
Jens Oberrath, Bochum, DE;
Peter Awakowicz, Bochum, DE;
Martin Lapke, Hamburg, DE;
Thomas Musch, Bochum, DE;
Thomas Mussenbrock, Wuppertal, DE;
Ilona Rolfes, Bochum, DE;
Christian Schulz, Bochum, DE;
Robert Storch, Bochum, DE;
Tim Styrnoll, Bochum, DE;
Christian Zietz, Hannover, DE;
RUHR-UNIVERSITÄT BOCHUM, Bochum, DE;
Abstract
The invention relates to a device and method for measuring the density of a plasma by determining an impulse response to a high-frequency signal coupled into a plasma. The density, electron temperature and/or collision frequency as a function of the impulse response can be determined. A probe having a probe head and a probe shaft can be introduced into the plasma, wherein the probe shaft is connected to a signal generator for electrically coupling a high-frequency signal into the probe head. The probe core is enclosed by the jacket and has at its surface mutually insulated electrode areas of opposite polarity. A balun is arranged at the transition between the probe head and an electrically unbalanced high-frequency signal feed to convert electrically unbalanced signals into balanced signals.