The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Aug. 18, 2015

Filed:

Apr. 13, 2010
Applicants:

Claus Dietrich, Thiendorf OT Sacka, DE;

Stojan Kanev, Thiendorf OT Sacka, DE;

Frank Fehrmann, Priestewitz OT Basslitz, DE;

Botho Hirschfeld, Dresden, DE;

Inventors:

Claus Dietrich, Thiendorf OT Sacka, DE;

Stojan Kanev, Thiendorf OT Sacka, DE;

Frank Fehrmann, Priestewitz OT Basslitz, DE;

Botho Hirschfeld, Dresden, DE;

Assignee:

Cascade Microtech, Inc., Beaverton, OR (US);

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01R 1/067 (2006.01); G01R 31/28 (2006.01);
U.S. Cl.
CPC ...
G01R 31/2891 (2013.01);
Abstract

The invention generally relates to a method and device for contacting contact areas () with probe tips () in a tester. The contact areas (), which are arranged on a substrate (), and the probe tips () are positioned relative to each other and then brought in contact with each other by an advancing motion. In order to detect a secure contact for each of the probe tips (), the contacting between the probe tips () and the contact areas () is observed from at least two observation directions (), which include an observation angle α in a range of 0 to 180°.


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