The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 18, 2015
Filed:
Sep. 27, 2012
Chien-ping Wang, Hsinchu County, TW;
Tzung-te Chen, Taipei, TW;
Pei-ting Chou, Taipei, TW;
Chun-fan Dai, Kaohsiung, TW;
Yi-ping Peng, Miaoli County, TW;
Chien-Ping Wang, Hsinchu County, TW;
Tzung-Te Chen, Taipei, TW;
Pei-Ting Chou, Taipei, TW;
Chun-Fan Dai, Kaohsiung, TW;
Yi-Ping Peng, Miaoli County, TW;
Industrial Technology Research Institute, Hsinchu, TW;
Abstract
A method for detecting a semiconductor device property is provided. First, a semiconductor device is provided. Thereafter, a detecting current is applied and the semiconductor device is heated, and temperatures and voltages of the semiconductor device are measured, so as to establish a relationship between the temperatures and the voltages of the semiconductor device. Accordingly, a temperature sensitive parameter (TSP) is calculated. An apparatus for detecting a semiconductor device property is also provided.