The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 18, 2015
Filed:
Jun. 18, 2011
Joseph D. Sweeney, Winsted, CT (US);
Anthony M. Avila, Austin, TX (US);
Michael J. Wodjenski, New Milford, CT (US);
Joseph R. Despres, Middletown, CT (US);
Thomas H. Baum, New Fairfield, CT (US);
Joseph D. Sweeney, Winsted, CT (US);
Anthony M. Avila, Austin, TX (US);
Michael J. Wodjenski, New Milford, CT (US);
Joseph R. Despres, Middletown, CT (US);
Thomas H. Baum, New Fairfield, CT (US);
ENTEGRIS, INC., Billerica, MA (US);
Abstract
Apparatus and method for determining endpoint of a fluid supply vessel in which fluid flow is controlled through a flow passage disposed in an interior volume of the fluid supply vessel with a static flow restricting device and a selectively actuatable valve element upon establishing fluid flow. The endpoint determination can be employed to terminate fluid supply from the fluid supply vessel and/or to switch from a fluid-depleted supply vessel to a fresh vessel for continuity or renewal of fluid supply operation. The apparatus and method are suitable for use with fluidutilizing apparatus such as ion implanters.