The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 11, 2015
Filed:
Feb. 22, 2012
Kensuke Matsuzawa, Kawasaki, JP;
Jun Iwashita, Kawasaki, JP;
Yoshitaka Komuro, Kawasaki, JP;
Masatoshi Arai, Kawasaki, JP;
Kensuke Matsuzawa, Kawasaki, JP;
Jun Iwashita, Kawasaki, JP;
Yoshitaka Komuro, Kawasaki, JP;
Masatoshi Arai, Kawasaki, JP;
Tokyo Ohka Kogyo Co., Ltd., Kawaski-shi, JP;
Abstract
A resist composition including a resin component which generates acid upon exposure and exhibits changed solubility in a developing solution under the action of acid, the resin component including a resin component having a structural unit represented by a general formula (a0-0-1) shown below in which R represents a hydrogen atom, an alkyl group of 1 to 5 carbon atoms or a halogenated alkyl group of 1 to 5 carbon atoms, Rrepresents a single bond or a divalent linking group, each of R, Rand Rindependently represents a linear, branched or cyclic alkyl group which may have a non-aromatic substituent, or Rand Rmay be bonded to each other to form a ring together with the sulfur atom, and X represents a non-aromatic divalent linking group or a single bond.