The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 11, 2015
Filed:
Jun. 14, 2013
Applicant:
Mitutoyo Corporation, Kanagawa, JP;
Inventors:
Han Haitjema, KP Eindhoven, NL;
Johannes Anna Quaedackers, Veldhoven, NL;
Assignee:
MITUTOYO CORPORATION, Kanagawa, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01B 11/02 (2006.01); G01B 9/02 (2006.01); G01B 11/06 (2006.01); G01N 21/45 (2006.01); G01N 21/41 (2006.01);
U.S. Cl.
CPC ...
G01B 9/02088 (2013.01); G01B 9/0209 (2013.01); G01B 9/02087 (2013.01); G01B 11/0675 (2013.01); G01N 21/45 (2013.01); G01N 2021/4126 (2013.01);
Abstract
Method of determining a property of a sample from a correlogram obtainable by scanning of a surface of the sample through a focal plane of an objective using broad-band interferometry is provided. The correlogram may be displaying interference radiation intensity as a function of the scanning distance from the surface. The correlogram may be correlated with a secondary correlogram to obtain a cross correlogram or with the same correlogram to obtain an autocorrelogram. A property of the sample may be determined from the auto or cross correlogram.