The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 11, 2015
Filed:
Apr. 20, 2009
Hiroyuki Orita, Tokyo, JP;
Takahiro Shirahata, Tokyo, JP;
Akio Yoshida, Tokyo, JP;
Shizuo Fujita, Kyoto, JP;
Naoki Kameyama, Kyoto, JP;
Hiroyuki Orita, Tokyo, JP;
Takahiro Shirahata, Tokyo, JP;
Akio Yoshida, Tokyo, JP;
Shizuo Fujita, Kyoto, JP;
Naoki Kameyama, Kyoto, JP;
TOSHIBA MITSUBISHI—ELECTRIC INDUSTRIAL SYSTEMS CORPORATION, Tokyo, JP;
KYOTO UNIVERSITY, Kyoto-shi, JP;
Abstract
The present invention aims at providing a method for forming a metal oxide film which can further improve the production efficiency while maintaining low resistance of a metal oxide film formed thereby. In the method for forming a metal oxide film of the present invention, a solution () containing a metallic element and ammonia () is formed into a mist. Meanwhile, a substrate () is heated. Then, the solution () formed into a mist is supplied onto a first main surface of the substrate () being heated.