The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 9099986 B1

PDF
Full Text
Expired
Date of Patent:
Aug. 04, 2015

Filed:

Nov. 14, 2011
Applicants:

Chengjie Zuo, Santee, CA (US);

Changhan Yun, San Diego, CA (US);

Chi Shun Lo, San Diego, CA (US);

Wesley Nathaniel Allen, Lafayette, IN (US);

Mario Francisco Velez, San Diego, CA (US);

Jonghae Kim, San Diego, CA (US);

Inventors:

Chengjie Zuo, Santee, CA (US);

Changhan Yun, San Diego, CA (US);

Chi Shun Lo, San Diego, CA (US);

Wesley Nathaniel Allen, Lafayette, IN (US);

Mario Francisco Velez, San Diego, CA (US);

Jonghae Kim, San Diego, CA (US);

Assignee:

QUALCOMM MEMS Technologies, Inc., San Diego, CA (US);

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 41/053 (2006.01); H03H 9/46 (2006.01); H03H 9/24 (2006.01); H03H 9/02 (2006.01);
U.S. Cl.
CPC ...
H03H 9/462 (2013.01); H03H 9/2405 (2013.01); H03H 9/2426 (2013.01); H03H 2009/02503 (2013.01); H03H 2009/241 (2013.01);
Abstract

Electromechanical systems dilation mode resonator (DMR) structures are disclosed. The DMR includes a first electrode layer, a second electrode layer, and a piezoelectric layer formed of a piezoelectric material. The piezoelectric layer has dimensions including a lateral distance (D), in a plane of an X axis and a Y axis perpendicular to the X axis, and a thickness (T), along a Z axis perpendicular to the X axis and the Y axis. A numerical ratio of the thickness and the lateral distance, T/D, is configured to provide a mode of vibration of the piezoelectric layer with displacement along the Z axis and along the plane of the X axis and the Y axis responsive to a signal provided to one or more of the electrodes. Ladder filter circuits can be constructed with DMRs as series and/or shunt elements, and the resonators can have spiral configurations.


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