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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 9099643 B1

PDFFull Text
Date of Patent:
Aug. 04, 2015

Filed:

Feb. 26, 2013

Method of etching a magnesium oxide film

Applicant:

Tdk Corporation, Tokyo, JP;

Inventors:

Hitoshi Hatate, Tokyo, JP;

Atsuyoshi Tsunoda, Tokyo, JP;

Makoto Fukui, Tokyo, JP;

Shuji Okame, Tokyo, JP;

Ken Fujii, Tokyo, JP;

Assignee:

TDK CORPORATION, Tokyo, JP;

Attorney:

Oliff PLC

Primary Examiner:

Yuanda Zhang

Assistant Examiner:

Sheikh Maruf

Int. Cl.
CPC ...
H01L 21/00 (2006.01); H01L 43/12 (2006.01); G11B 5/39 (2006.01); G01R 33/09 (2006.01);
U.S. Cl.
CPC ...
H01L 43/12 (2013.01); G01R 33/093 (2013.01); G01R 33/098 (2013.01); G11B 5/3909 (2013.01); G11B 2005/3996 (2013.01);
Abstract

A magnetoresistive device includes an MR element including a metal layer, and an insulating portion made of magnesium oxide and in contact with the MR element. A method of manufacturing the magnetoresistive device includes the step of removing an unwanted magnesium oxide film that is formed by the magnesium oxide in the process of forming the insulating portion. In this step, the unwanted magnesium oxide film is wet etched by using an etchant containing an aqueous ammonia solution.

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Hatate, Hitoshi. (2015). Method of etching a magnesium oxide film (U.S. Patent No. 9099643). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/9099643

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