The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 04, 2015
Filed:
Mar. 04, 2011
Makoto Kobayashi, Oshu, JP;
Makoto Kobayashi, Oshu, JP;
Tokyo Electron Limited, Minato-Ku, JP;
Abstract
A vertical heat treatment apparatus including a furnace body having a heating section in the inner circumferential surface; a treatment container for housing a plurality of objects W to be treated. An air supply line is connected to the furnace body, and an air exhaust line is connected to the furnace body. An air supply blower and an air supply line valve mechanism, and an air exhaust blower and an air exhaust line valve mechanism are provided in the air supply line and the air exhaust line, respectively. A pressure detection system is provided for detecting the pressure in the space. A control section controls, based on a detection signal from the pressure detection system the blowers, the air supply line valve mechanism and the air exhaust line valve mechanism to keep the space at a slightly negative pressure.