The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 04, 2015
Filed:
May. 26, 2010
Ilya Bezel, Sunnyvale, CA (US);
Anatoly Shchemelinin, Pleasanton, CA (US);
Yanming Zhao, Milpitas, CA (US);
Gildardo R. Delgado, Livermore, CA (US);
Ilya Bezel, Sunnyvale, CA (US);
Anatoly Shchemelinin, Pleasanton, CA (US);
Yanming Zhao, Milpitas, CA (US);
Gildardo R. Delgado, Livermore, CA (US);
KLA-Tencor Corporation, Milpitas, CA (US);
Abstract
A laser sustained plasma light source having a cell formed as a continuous tube with a circular cross section, a gas volume contained within the cell, at least one laser directed into the gas volume, for sustaining a plasma within the gas volume, the plasma producing a light, where the gas volume is heated as it leaves the plasma, cools as it circulates around the continuous tube of the cell, and reenters the plasma cooler than when it left the plasma and in a laminar flow, and a reflector for collecting the light and providing the light to a desired location.