The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Aug. 04, 2015

Filed:

Apr. 17, 2013
Applicant:

Omniprobe, Inc., Dallas, TX (US);

Inventors:

Rocky Kruger, Dallas, TX (US);

Aaron Smith, Dallas, TX (US);

Cheryl Hartfield, Dallas, TX (US);

Assignee:

Omniprobe, Inc., Dallas, TX (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C 16/00 (2006.01); G01N 1/28 (2006.01); C23C 16/448 (2006.01); C23C 16/48 (2006.01); C23C 16/52 (2006.01); C23C 16/56 (2006.01); H01J 37/02 (2006.01);
U.S. Cl.
CPC ...
G01N 1/28 (2013.01); C23C 16/448 (2013.01); C23C 16/48 (2013.01); C23C 16/52 (2013.01); C23C 16/56 (2013.01); H01J 37/02 (2013.01); H01J 2237/006 (2013.01); H01J 2237/317 (2013.01);
Abstract

A gas injection system for an energetic-beam instrument having a vacuum chamber. The system has a cartridge containing a chemical serving as a source for an output gas to be delivered into the vacuum chamber. The cartridge has a reservoir containing the chemical, which rises to a fill line having a level defined by an amount of the chemical present in the reservoir at a given time. An outlet from the reservoir is coupled to an output passage through an outlet valve and configured so that when the system is tilted the outlet remains above the level of the fill line. Embodiments include isolation valves allowing the cartridge to be disconnected without destroying system vacuum.


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