The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 04, 2015
Filed:
Jul. 13, 2012
Sandeep Mariserla, Danbury, CT (US);
Brian Kennedy Foster, Mountain View, CA (US);
Aaron T. Francis, San Jose, CA (US);
Gregory P. Lim, Fremont, CA (US);
Jeffrey Chih-hou Lowe, Cupertino, CA (US);
Robert Anthony Sculac, Lake Oswego, OR (US);
Sandeep Mariserla, Danbury, CT (US);
Brian Kennedy Foster, Mountain View, CA (US);
Aaron T. Francis, San Jose, CA (US);
Gregory P. Lim, Fremont, CA (US);
Jeffrey Chih-Hou Lowe, Cupertino, CA (US);
Robert Anthony Sculac, Lake Oswego, OR (US);
Intermolecular, Inc., San Jose, CA (US);
Abstract
Multiple waste streams, including incompatible chemicals such as concentrated acids and/or strong base effluents, are handled together without the need for limiting or interrupting the processes run by the wafer processing tools. In some embodiments, waste tanks are primed with diluents, such as water, and a predetermined percentage of diluent is maintained in the waste tanks. In some embodiments, a diluent is flowed into the waste tanks concurrently with the waste pumping to generate a rinsing action for the waste tanks. Methods of the present disclosure accommodate both gravity type and vacuum type waste tanks.