The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 9095834 B1

PDF
Full Text
Expired
Date of Patent:
Aug. 04, 2015

Filed:

Feb. 08, 2012
Applicants:

Cormac Patrick Byrne, Belfast, GB;

Brian Joseph Meenan, Lisburn, GB;

Raechelle Andrea D'sa, Belfast, GB;

Inventors:

Cormac Patrick Byrne, Belfast, GB;

Brian Joseph Meenan, Lisburn, GB;

Raechelle Andrea D'Sa, Belfast, GB;

Assignee:

Innovation Ulster Limited, Coleraine, Northern Ireland, GB;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H05H 1/24 (2006.01); B01J 19/08 (2006.01); H01J 37/32 (2006.01);
U.S. Cl.
CPC ...
B01J 19/08 (2013.01); H01J 37/32009 (2013.01); H01J 37/32366 (2013.01); H01J 37/32568 (2013.01);
Abstract

A method of modifying a substrate using a plasma comprises providing a first electrode and a second electrode; arranging the substrate such that only a portion of the substrate is between the electrodes; and rotating either the substrate or at least one of the electrodes about an axis so as to cause different portions of the substrate to pass between the electrodes during the rotation. A voltage is supplied to at least one of the electrodes so as to create a plasma discharge between the electrodes which contacts at least the portions of the substrate that pass between the electrodes. The electrodes and the substrate are arranged such that the rotating causes the speed of transit of the substrate portion between the electrodes to vary in a radial direction away from the axis of rotation and the rate that the plasma discharge modifies the substrate varies across the substrate.


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