The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jul. 28, 2015

Filed:

Dec. 08, 2013
Applicant:

Texas Instruments Incorporated, Dallas, TX (US);

Inventors:

Shaofeng Yu, Plano, TX (US);

Russell Carlton McMullan, Allen, TX (US);

Wah Kit Loh, Richardson, TX (US);

Assignee:
Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
H01L 29/08 (2006.01); H01L 27/11 (2006.01); H01L 21/8238 (2006.01); H01L 27/092 (2006.01);
U.S. Cl.
CPC ...
H01L 27/1104 (2013.01); H01L 21/823814 (2013.01); H01L 21/823864 (2013.01); H01L 21/823871 (2013.01); H01L 27/0922 (2013.01); H01L 29/0847 (2013.01);
Abstract

An integrated circuit containing an SAR SRAM and CMOS logic, in which sidewall spacers on the gate extension of the SAR SRAM cell are thinner than sidewall spacers on the logic PMOS gates, so that the depth of the drain node SRAM PSD layer is maintained under the stretch contact. A process of forming an integrated circuit containing an SAR SRAM and CMOS logic, including selectively etch the sidewall spacers on the on the gate extension of the SAR SRAM cell, so that the depth of the drain node SRAM PSD layer is maintained under the stretch contact. A process of forming an integrated circuit containing an SAR SRAM and CMOS logic, including selectively implanting extra p-type dopants in the drain node SRAM PSD layer, so that the depth of the drain node SRAM PSD layer is maintained under the stretch contact.


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