The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jul. 28, 2015

Filed:

Sep. 06, 2013
Applicant:

Industrial Technology Research Institute, Hsinchu, TW;

Inventors:

Shang-Chun Chen, Hsinchu County, TW;

Cha-Hsin Lin, Miaoli County, TW;

Tzu-Kun Ku, Hsinchu, TW;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 23/04 (2006.01); H01L 23/00 (2006.01); H01L 21/48 (2006.01); H01L 25/065 (2006.01); H01L 23/14 (2006.01); H01L 23/498 (2006.01);
U.S. Cl.
CPC ...
H01L 24/11 (2013.01); H01L 21/4803 (2013.01); H01L 21/486 (2013.01); H01L 23/145 (2013.01); H01L 23/49827 (2013.01); H01L 25/065 (2013.01); H01L 24/81 (2013.01); H01L 2224/16235 (2013.01); H01L 2224/81192 (2013.01);
Abstract

A semiconductor device and a manufacturing method thereof are provided. The manufacturing method includes following steps. A mold is provided. The mold has a chamber and a plurality of protrusions in the chamber. A thermosetting material is injected into the chamber. The thermosetting material is cured. A parting step is performed to separate the cured thermosetting material from the mold, so as to form an interposer substrate. A plurality of blind holes corresponding to the protrusions is formed on the interposer substrate. A conductive material is filled into the blind holes to form a plurality of conductive pillars. A conductive pattern layer is formed on a surface of the interposer substrate. The conductive pattern layer is electrically connected with the conductive pillars.


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