The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 28, 2015
Filed:
Apr. 01, 2014
Applicant:
Nikon Corporation, Tokyo, JP;
Inventors:
Daniel Gene Smith, Tucson, AZ (US);
Donis G. Flagello, Half Moon Bay, CA (US);
Assignee:
NIKON CORPORATION, Tokyo, JP;
Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
G03B 27/80 (2006.01); G03B 27/54 (2006.01); G03F 7/20 (2006.01);
U.S. Cl.
CPC ...
G03F 7/7055 (2013.01); G03F 7/705 (2013.01); G03F 7/70083 (2013.01);
Abstract
Method of predicting a distribution of light in an illumination pupil of an illumination system includes identifying component(s) of the illumination system the adjustment of which affects this distribution and simulating the distribution based on a point spread function defined in part by the identified components. The point spread function has functional relationship with configurable setting of the illumination settings.