The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 28, 2015
Filed:
Sep. 24, 2012
Applicant:
Stmicroelectronics Pte Ltd., Singapore, SG;
Inventors:
Gino George, Singapore, SG;
KeenYip Koh, Singapore, SG;
CheeChiang Lee, Yishun, SG;
Ditto Adnan, Singapore, SG;
Assignee:
STMICROELECTRONICS PTE LTD, Singapore, SG;
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01F 7/00 (2006.01); G03F 7/16 (2006.01); H01L 21/67 (2006.01);
U.S. Cl.
CPC ...
G03F 7/16 (2013.01); H01L 21/6715 (2013.01);
Abstract
A photoresist delivery system includes a photoresist pump, a photoresist reservoir coupled to the photoresist pump, and a photoresist container. A control valve is between the photoresist reservoir and the photoresist container and is movable from a closed position to an open position upon engagement of the photoresist container with the photoresist reservoir to replenish photoresist therein.