The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 28, 2015
Filed:
Mar. 12, 2013
Canon Kabushiki Kaisha, Tokyo, JP;
Hitoshi Iijima, Utsunomiya, JP;
Atsushi Maeda, Utsunomiya, JP;
Canon Kabushiki Kaisha, Tokyo, JP;
Abstract
To eliminate influence of undesirable light component from an object when measuring optical characteristics such as shape and wavefront aberration of the object, light from light source () is separated by polarization beam splitter () into measuring light (L) that irradiates and travels via the object () and is condensed on image plane (P) through microlenses () of microlens array (), and reference light (L) that does not irradiate the object and is guided to the image plane by reference light optical system (). A computer () acquires picked-up images sequentially from CCD image sensor () arranged on the image plane while changing optical path length of the reference light by movable stage (), extracts interference light spots generated through interference between signal light component and the reference light from the picked-up images, calculates positions of the interference light spots, and calculates deviation amounts of positions from predetermined reference positions.