The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jul. 28, 2015

Filed:

Aug. 20, 2013
Applicant:

Mitutoyo Corporation, Kanagawa, JP;

Inventors:

Hideyuki Nakagawa, Ibaraki, JP;

Nobuhiro Ishikawa, Ibaraki, JP;

Assignee:

MITUTOYO CORPORATION, Kanagawa, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01B 5/008 (2006.01); G01B 21/04 (2006.01);
U.S. Cl.
CPC ...
G01B 5/008 (2013.01); G01B 21/045 (2013.01);
Abstract

A shape measuring machine includes a slider that supports a scanning probe. A scale unit detects a displacement of the slider. A tip sphere displacement detection unit detects a displacement of the tip sphere. A calculation unit includes a correction filter including a first and second filters and an adder, and calculates a measurement value from the displacements of the slider and the tip sphere. The first filter corrects the displacement of the slider based on a frequency transfer characteristic from the scale unit to the tip of the slider. The second filter outputs a value that is obtained by correcting a value corrected by the first filter based on a frequency transfer characteristic from the tip of the slider to the tip sphere as the correction value. The adder outputs a measurement value obtained by adding the correction value and the displacement of the tip sphere.


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