The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 28, 2015
Filed:
Jul. 13, 2012
Applicants:
Iqbal Shareef, Fremont, CA (US);
Piyush Agarwal, Milpitas, CA (US);
Evangelos Spyropoulos, San Jose, CA (US);
Mark Taskar, San Mateo, CA (US);
Inventors:
Iqbal Shareef, Fremont, CA (US);
Piyush Agarwal, Milpitas, CA (US);
Evangelos Spyropoulos, San Jose, CA (US);
Mark Taskar, San Mateo, CA (US);
Assignee:
LAM RESEARCH CORPORATION, Fremont, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
E03B 11/00 (2006.01); F17D 1/00 (2006.01);
U.S. Cl.
CPC ...
F17D 1/00 (2013.01);
Abstract
Apparatus and methods for sharing a gas panel among a plurality of multi-zone gas feed chambers of a plasma processing chamber. Each multi-zone gas feed chamber is provided with its own multi-zone gas feed device to adjustably split the incoming gas flow into each chamber and provide the different gas flows to different zones of the multi-zone gas feed chamber.