The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 21, 2015
Filed:
Dec. 10, 2013
Applicant:
Plasmart Inc., Daejeon, KR;
Inventor:
Wonoh Lee, Daejeon, KR;
Assignee:
PLASMART INC., Daejeon, KR;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H03H 7/38 (2006.01); H05H 1/46 (2006.01); H03H 7/40 (2006.01); H01G 5/40 (2006.01);
U.S. Cl.
CPC ...
H03H 7/38 (2013.01); H05H 1/46 (2013.01); H01G 5/40 (2013.01); H03H 7/40 (2013.01); H05H 2001/4682 (2013.01);
Abstract
An impedance matching device includes a first variable capacitor connected to an RF power source and including a first shaft moving linearly, a first linear motion unit axially coupled to the first shaft of the first variable capacitor to provide linear motion, a first insulating joint connecting the first shaft to a first driving shaft of the first linear motion unit, and a first displacement sensor adapted to measure a movement distance of the first driving shaft of the first linear motion unit.