The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 21, 2015
Filed:
Dec. 19, 2013
Applicant:
Intermolecular, Inc., San Jose, CA (US);
Inventors:
Chen-An Chen, San Jose, CA (US);
Tony P. Chiang, Campbell, CA (US);
Frank Greer, Pasadena, CA (US);
Martin Romero, San Jose, CA (US);
James Tsung, Milpitas, CA (US);
Assignee:
Intermolecular, Inc., San Jose, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/31 (2006.01); H01L 21/469 (2006.01); H01L 21/677 (2006.01); H01L 21/02 (2006.01);
U.S. Cl.
CPC ...
H01L 21/67703 (2013.01); H01L 21/0228 (2013.01); H01L 21/02271 (2013.01); H01L 21/02274 (2013.01);
Abstract
In some embodiments, apparatus are provided that provide for flexible processing in high productivity combinatorial (HPC) system. The apparatus allow for interchangeable functionality that includes deposition, plasma treatment, ion beam treatment, in-situ annealing, and in-situ metrology. The apparatus are designed so that the functionality may be integrated within a single processing chamber for enhanced flexibility.