The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 21, 2015
Filed:
Apr. 29, 2014
Globalfoundries Inc., Grand Cayman, KY;
Edmund Kenneth Banghart, Pittsford, NY (US);
Yanxiang Liu, Glenville, NY (US);
Shesh Mani Pandey, Clifton Park, NY (US);
GLOBALFOUNDRIES INC., Cayman Islands, Grand Cayman, KY;
Abstract
Methods are provided for fabricating a fin-type field effect transistor(s), having a channel region within a fin. The methods include: establishing a protective material above an upper surface of the fin, and an isolation material adjacent to at least one sidewall of the fin, the isolation material being recessed down from the upper surface of the fin, for instance, for approximately a height of the channel region within the fin; and providing a punch-through stop dopant region within the fin below the channel region, the providing including implanting a punch-through stop dopant into the isolation material and laterally diffusing the punch-through stop dopant from the isolation material into the fin to form the punch-through stop region within the fin beneath the channel region.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile